Determination of complex refractive index of SU-8 by Kramers–Kronig dispersion relation method at the wavelength range 2.5–22.0 µm

Abstract

Accurate determination of the complex refractive index of SU-8 epoxy has significant for the wide variety of applications in optical sensor technology at IR range. The complex refractive index of SU-8 is determined by recording the transmission of light spectra for the wavelength range of 2.5–22.0 µm. The data analysis is based on the Kramers–Kronig dispersion relation method. The method has several merits, such as ease of operation, non-contact technique, measurement accuracy, and rapid measurement. The present method is not restricted to the case of SU-8 but it is also proposed to be applicable across a broad range of applications, such as assessment of the optical properties of paints and biomedical samples.