Synthesis of Micro-robotic Appendages Considering Different Performance Properties

Abstract

This paper presents a synthesis method for microelectromechanical system (MEMS) terrestrial micro-robotic appendages considering their different performance properties. In micro-robotics, actuation is often a challenge. Among candidate actuator types, thin-film lead-zirconate-titanite (PZT) may be adopted due to potential advantages in energy density and voltage and current requirements. Proposed micro-robotic appendages may be comprised of multiple micromachined materials: parylene-C (soft, passive), silicon (rigid, passive) a and thin-film PZT laminates (active). But a synthesis method for such type of micro-robots is lacking. In this paper, the topology optimization synthesis approach is introduced considering placement (type, dimensions, location, and orientation) of both active (thin-film PZT) and passive (parylene-C and Si) multiple materials. The goal of the optimization is to realize micro-robotic appendages solutions, where transport ability and projected walking speed are maximized while needed electrical power is minimized. The individual steps in the synthesis process are presented together with different obtained solutions. Finite element method simulations of the micro-robotic appendage deformation behavior are presented as well.