Modeling and manufacturing of miniature coils for Ni-Mn-Ga micro-devices

Abstract

This thesis is aimed to develop a miniature copper coil for use in Ni-Mn-Ga-based magnetic shape memory alloy micro-devices. The research focus is mainly on the copper coil geometry calculation. The used calculation model is based on the finite element method (FEM). The calculations are performed to find the effect of the main parameters of copper coil geometry and to find the optimal parameters values to create the required magnetic field strength. The presented calculations are confirmed by experimental results. Additionally, it was shown that copper coils can be successfully produced via femtosecond pulsed laser micromachining and the performed calculations are validated via measurements conducted on the manufactured coils.