Design, implementation, and impact of an upgrade module for an aging mask aligner : a case study in using design thinking to refurbish semiconductor manufacturing technology

Abstract

Within the innovative field of the semiconductor industry, this thesis presents a comprehensive exploration of the design, development, and implementation of an upgrade module of an aging mask aligner, integrating a UV-LED light source and an optimised optical design. The research uses a design thinking methodology and includes seven different studies, including a literature review, benchmark study, observations, interviews, simulations, optical performance tests and user experience evaluations. The key findings highlight the successful improvement of the optical performance of the mask aligner, resulting in accelerated throughput, improved yields, and overall operational efficiency at the client’s production facility. This thesis contributes to theoretical insights into optical design, the application of design thinking in engineering and the practical feasibility of upgrading outdated semiconductor manufacturing equipment. The study concludes with the recognition of the commercialisation potential and outlines areas for further research and development.